共 50 条
- [2] A HIGH-SPEED ELECTRON-BEAM LITHOGRAPHY SYSTEM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 932 - 935
- [3] HIGH-SPEED DIRECT WRITE ELECTRON-BEAM SYSTEM PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 333 : 89 - 93
- [4] A PRECISION HIGH-SPEED ELECTRON-BEAM LITHOGRAPHY SYSTEM HEWLETT-PACKARD JOURNAL, 1981, 32 (05): : 3 - 13
- [5] HIGH-SPEED ELECTRON-BEAM TESTING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 1814 - 1819
- [7] A HIGH-SPEED, HIGH-PRECISION ELECTRON-BEAM LITHOGRAPHY SYSTEM (ELECTRON OPTICS) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 98 - 101
- [9] CELL PROJECTION COLUMN FOR HIGH-SPEED ELECTRON-BEAM LITHOGRAPHY SYSTEM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2799 - 2803
- [10] A COMPARISON OF ELECTRON GUNS FOR HIGH-SPEED ELECTRON-BEAM INSPECTION SCANNING ELECTRON MICROSCOPY, 1984, : 1585 - 1600