A PRACTICAL HIGH-SPEED ELECTRON-BEAM TEST SYSTEM

被引：0
|
作者：
BRUNNER, M [1 ]
WINKLER, D [1 ]
SCHMITT, R [1 ]
LISCHKE, B [1 ]
机构：
[1] SIEMENS AG,RES LABS,MUNICH,FED REP GER
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C115 / C115
页数：1
相关论文
共 50 条
  • [21] ELECTRON-BEAM PROXIMITY PRINTER FOR HIGH-SPEED PATTERN REPLICATION
    BOHLEN, H
    GRESCHNER, J
    KEYSER, J
    KULCKE, W
    NEHMIZ, P
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : C105 - C105
  • [22] THERMAL SURFACE MODIFICATION BY ELECTRON-BEAM HIGH-SPEED SCANNING
    SCHILLER, S
    PANZER, S
    SURFACE & COATINGS TECHNOLOGY, 1989, 39 (1-3): : 521 - 529
  • [23] AUTOMATIC COLUMN CONTROL FOR HIGH-SPEED ELECTRON-BEAM DELINEATOR
    GOTO, M
    WADA, H
    NAKASUJI, M
    YOSHIKAWA, Y
    MURAGUCHI, Y
    TAKIGAWA, T
    SASAKI, S
    SANO, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 181 - 184
  • [24] Production of Granulated Relite by High-Speed Electron-Beam Evaporation
    Hrechaniuk, N. I.
    Khomenko, O. V.
    Smashnyuk, Yu. A.
    Kuzmenko, N. N.
    Kulak, L. D.
    POWDER METALLURGY AND METAL CERAMICS, 2019, 58 (5-6) : 301 - 306
  • [25] THERMAL SURFACE MODIFICATION BY ELECTRON-BEAM HIGH-SPEED SCANNING
    SCHILLER, S
    PANZER, S
    ANNUAL REVIEW OF MATERIALS SCIENCE, 1988, 18 : 121 - 140
  • [26] A NOVEL HIGH-SPEED NANOMETRIC ELECTRON-BEAM LITHOGRAPHY SYSTEM - EB-F
    IWADATE, K
    YAMAGUCHI, R
    HIRATA, K
    HARADA, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 75 - 78
  • [27] HIGH-SPEED, LOW-OVERHEAD ELECTRON-BEAM DIRECT SLICE WRITING SYSTEM
    VARNELL, GL
    SPICER, DF
    HEBLEY, J
    ROBBINS, R
    CARPENTER, C
    MALONE, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1787 - 1793
  • [28] A HIGH-SPEED PATTERNING CONTROLLER FOR THE EB60 ELECTRON-BEAM LITHOGRAPHY SYSTEM
    MOROSAWA, T
    SHIBAYAMA, A
    MURASHITA, T
    FUJINAMI, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 66 - 69
  • [29] HIGH-SPEED ELECTRON-BEAM TESTING OF VLSI CIRCUITS BY BACKSCATTERED ELECTRON DETECTION
    KHURSHEED, A
    ELECTRONICS LETTERS, 1990, 26 (20) : 1657 - 1658
  • [30] A PRECISION, HIGH-CURRENT, HIGH-SPEED ELECTRON-BEAM LITHOGRAPHY COLUMN
    KELLY, J
    GROVES, TR
    KUO, HP
    HEWLETT-PACKARD JOURNAL, 1981, 32 (05): : 14 - &
12345