II-VI COMPOUND THIN-FILM DEPOSITION BY RESONANT LASER SPUTTERING

被引：5
|
作者：
LIU, Z
GELINAS, MP
COOMBE, RD
机构：
[1] Department of Chemistry, University of Denver, Denver
来源：
JOURNAL OF APPLIED PHYSICS | 1994年 / 75卷 / 06期
关键词：
D O I：
10.1063/1.356161
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Time-resolved laser-induced fluorescence measurements indicate that Zn atoms excited to the 4 3P(J) metastable state react rapidly with group-VI Molecules O2, CS2, and H2S. Rate constants for these processes are presented. Based on these data, a method for deposition of thin films of the ZnO or ZnS products of these reactions is demonstrated, wherein the Zn atoms are both sputtered from a target and excited to the 4 3p(J) state by near-resonant radiation from a pulsed XeCl laser.
引用
收藏
页码：3098 / 3104
页数：7
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