THE MECHANISM OF N-H BOND DECOMPOSITION IN SILICON-NITRIDE FILMS

被引：12
|
作者：
SMIRNOVA, TP
BELYI, VI
CHRAMOVA, LV
机构：
来源：
THIN SOLID FILMS | 1980年 / 74卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90092-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：287 / 293
页数：7
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