THE MECHANISM OF N-H BOND DECOMPOSITION IN SILICON-NITRIDE FILMS

被引：12

|

作者：

SMIRNOVA, TP

BELYI, VI

CHRAMOVA, LV

机构：

来源：

THIN SOLID FILMS | 1980年 / 74卷 / 02期

关键词：

D O I：

10.1016/0040-6090(80)90092-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：287 / 293

页数：7

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