TRANSPARENT AND HIGHLY CONDUCTIVE FILMS OF ZNO PREPARED BY RF REACTIVE MAGNETRON SPUTTERING

被引：181
|
作者：
WEBB, JB [1 ]
WILLIAMS, DF [1 ]
BUCHANAN, M [1 ]
机构：
[1] NATL RES COUNCIL CANADA,SOLAR ENERGY PROJECT,OTTAWA K1A 0R6,ONTARIO,CANADA
来源：
APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 08期
关键词：
D O I：
10.1063/1.92815
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：640 / 642
页数：3
相关论文
共 50 条
  • [41] Electrical and optical properties of molybdenum-doped ZnO transparent conductive thin films prepared by dc reactive magnetron sputtering
    Wu, Chenguo
    Shen, Jie
    Ma, Jin
    Wang, Sanpo
    Zhang, Zhuangjian
    Yang, Xiliang
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2009, 24 (12)
  • [42] HIGHLY TRANSPARENT AND CONDUCTIVE ZN2IN2O5 THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    MINAMI, T
    SONOHARA, H
    KAKUMU, T
    TAKATA, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1995, 34 (8A): : L971 - L974
  • [43] Highly conductive titanium oxide films by RF magnetron sputtering
    Sakaguchi, Koichi
    Fukazawa, Masaki
    Shimakawa, Koichi
    Hatanaka, Yoshinori
    [J]. PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 9, 2011, 8 (09): : 2742 - 2745
  • [44] Characteristics of ZnO:In thin films prepared by RF magnetron sputtering
    Peng, L. P.
    Fang, L.
    Yang, X. F.
    Ruan, H. B.
    Li, Y. J.
    Huang, Q. L.
    Kong, C. Y.
    [J]. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2009, 41 (10): : 1819 - 1823
  • [45] Highly oriented and transparent polycrystalline ZnO films prepared by RF actively sputtering technique
    Gong, Heng-Xiang
    Wang, Yin-Yue
    Fang, Ze-Bo
    Xu, Da-Yin
    Yang, Ying-Hu
    [J]. Lanzhou Daxue Xuebao/Journal of Lanzhou University, 2002, 38 (02):
  • [46] Transparent and conductive Ga-doped ZnO films grown by RF magnetron sputtering on polycarbonate substrates
    Gong, Li
    Lu, Jianguo
    Ye, Zhizhen
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2010, 94 (06) : 937 - 941
  • [47] Preparation and character of ZnO:Al transparent conductive films deposited on polymer substrates by RF magnetron sputtering
    Xiao-Jing, Wang
    De-Jun, Li
    Jun, Wang
    [J]. OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2011, 5 (10): : 1111 - 1114
  • [48] PROPERTIES OF CONDUCTIVE ZINC-OXIDE FILMS FOR TRANSPARENT ELECTRODE APPLICATIONS PREPARED BY RF MAGNETRON SPUTTERING
    SCHROPP, REI
    MADAN, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1989, 66 (05) : 2027 - 2031
  • [49] Transparent conductive F-doped SnO2 films prepared by RF reactive magnetron sputtering at low substrate temperature
    B. L. Zhu
    Y. T. Yang
    W. C. Hu
    J. Wu
    Z. H. Gan
    J. Liu
    D. W. Zeng
    C. S. Xie
    [J]. Applied Physics A, 2017, 123
  • [50] TRANSPARENT CONDUCTIVE ZNO/AL FILMS PREPARED BY THE PLANAR MAGNETRON SPUTTERING SYSTEM WITH OBLIQUELY FACING TARGETS
    TOMINAGA, K
    SUEYOSHI, Y
    IMAI, H
    SHINTANI, Y
    [J]. SURFACE & COATINGS TECHNOLOGY, 1993, 62 (1-3): : 683 - 687
12345