共 50 条
- [32] Real-time scanner error correction in white light interferometry OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS III, 2014, 9276
- [33] Correction of systematic error by extended Kalman Filter PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 3, 2002, : 195 - 199
- [36] Detection and assessment of the nonuniform phase displacement error in temporal phase shifting interferometry INTERFEROMETRY XIII: TECHNIQUES AND ANALYSIS, 2006, 6292
- [40] POLARIZATION COMPONENT PHASE SHIFTERS IN PHASE-SHIFTING INTERFEROMETRY - ERROR ANALYSIS OPTICA ACTA, 1986, 33 (06): : 787 - 793