LASER SPECTROSCOPY AND GAS-PHASE CHEMISTRY IN CVD

被引：0
|
作者：
HO, P [1 ]
COLTRIN, ME [1 ]
BREILAND, WG [1 ]
机构：
[1] SANDIA NATL LABS,DIV LASER & ATOM PHYS 1126,ALBUQUERQUE,NM 87185
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1986年 / 192卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：7 / IAEC
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