USE OF ION-IMPLANTATION FOR IMPROVING THE ADHESION OF DIAMOND-LIKE CARBON-FILMS DEPOSITED BY MEANS OF OTHER TECHNIQUES

被引：6
|
作者：
PIVIN, JC
LEE, TJ
YOU, JH
PARK, H
DAVANLOO, F
COLLINS, CB
CATANIA, P
SAMPEUR, Y
BERNAS, H
机构：
[1] UNIV TEXAS,CQE,RICHARDSON,TX 75083
[2] ICMC CO,F-91830 COUDRAY MONTCEAUX,FRANCE
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷
关键词：
D O I：
10.1016/0168-583X(93)90829-U
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Nanoindentation and friction tests have been used to establish the beneficial effect of pre-implantation of low C fluences upon the adhesion of diamond-like coatings synthesized by a laser plasma or by plasma enhanced chemical vapour deposition. The improvement is attributed to an interfacial layer of carbide.
引用
收藏
页码：1499 / 1501
页数：3
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