STUDY OF DIAMOND-LIKE CARBON-FILMS BY SECONDARY ION MASS-SPECTROMETRY

被引：1
|
作者：
GARCIACUENCA, MV
SERRA, C
LOPEZ, F
MORENZA, JL
机构：
[1] Universitat de Barcelona, Department de Física Aplicada i Electrònica, E08028 Barcelona
来源：
THIN SOLID FILMS | 1991年 / 205卷 / 01期
关键词：
D O I：
10.1016/0040-6090(91)90468-D
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Carbon films with diamond-like properties were deposited onto silicon by r.f. plasma decomposition of methane. Three series of films deposited in a range of substrate biases, onto unrefrigerated, refrigerated or heated substrates, have been analysed by secondary ion mass spectrometry. The sputter rate, the Si-C transition width and the C2:C3 signal ratio vary with the substrate bias and present a critical point at about 450 V.
引用
收藏
页码：43 / 46
页数：4
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