LASER ANNEALING OF BI-IMPLANTED ZNTE

被引:7
|
作者
BONTEMPS, A [1 ]
CAMPISANO, SU [1 ]
FOTI, G [1 ]
MONDIO, G [1 ]
SAITTA, G [1 ]
机构
[1] UNIV CATANIA,IST STRUTTURA MATERIA,I-95129 CATANIA,ITALY
关键词
D O I
10.1063/1.91573
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:542 / 544
页数:3
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