GROWTH OF METASTABLE INSB1-XBIX THIN-FILMS BY MULTITARGET SPUTTERING

被引：31
|
作者：
ZILKO, JL
GREENE, JE
机构：
[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源：
APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 03期
关键词：
D O I：
10.1063/1.90317
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：254 / 256
页数：3
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