ETCH-BACK PLANARIZATION TECHNIQUE FOR MULTILEVEL METALLIZATION

被引：2
|
作者：
MAYUMI, S [1 ]
FUJIWARA, K [1 ]
NISHIDA, S [1 ]
UEDA, S [1 ]
INOUE, M [1 ]
机构：
[1] MATSUSHITA ELECTR CORP,DIV MEMORY,KYOTO 617,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 02期
关键词：
D O I：
10.1143/JJAP.27.280
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：280 / 286
页数：7
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