共 50 条
- [11] Radiation damage and annealing behavior of 2.0 MeV 160Er+ implanted silicon MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 77 (01): : 1 - 5
- [12] PULSED ELECTRON-BEAM ANNEALING OF ARSENIC IMPLANTATION DAMAGE IN SILICON JOURNAL DE PHYSIQUE, 1982, 43 (NC-5): : 411 - 420
- [13] Rutherford backscattering and electron microscopy study of annealing behavior of MeV implanted gold in silicon NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 222 (1-2): : 249 - 254
- [14] Study of 3-MeV electron irradiation damage in amorphous silicon with TRMC AMORPHOUS AND NANOCRYSTALLINE SILICON SCIENCE AND TECHNOLOGY- 2004, 2004, 808 : 165 - 170
- [15] Annealing behavior of MeV implanted carbon in silicon Journal of Applied Physics, 1993, 74 (06):
- [17] Annealing behavior of a doubly MeV implanted silicon ION IMPLANTATION TECHNOLOGY - 96, 1997, : 661 - 664
- [19] ANNEALING STUDIES OF PHOTOCONDUCTIVITY IN SILICON IRRADIATED WITH 1.2-MEV ELECTRONS AT 10 DEGREES K BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1969, 14 (04): : 557 - &