PREPARATION AND PROPERTIES OF NONCRYSTALLINE SILICON CARBIDE FILMS

被引：39
|
作者：
MOGAB, CJ
KINGERY, WD
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 08期
关键词：
D O I：
10.1063/1.1656832
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3640 / &
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