WAFER BOW AND WARPAGE

被引：14
|
作者：
TAKASU, SI [1 ]
OTSUKA, H [1 ]
YOSHIHIRO, N [1 ]
OKU, T [1 ]
机构：
[1] VLSI COOPERAT LABS,TAKATSU KU,KAWASAKI 213,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 01期
关键词：
D O I：
10.7567/JJAPS.20S1.25
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：25 / 30
页数：6
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