MICROPROCESSOR-CONTROLLED LASER SCANNING SYSTEM FOR ANNEALING OF SEMICONDUCTORS

被引：0

作者：

HEIDARY, HR ^{[1
]}

BEGLEY, DL ^{[1
]}

CORAOR, LD ^{[1
]}

机构：

[1] SO ILLINOIS UNIV,DEPT ELECT SCI & SYST ENGN,CARBONDALE,IL 62901

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1980年 / 70卷 / 12期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1571 / 1572

页数：2

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