SPUTTER-DEPOSITION OF DECORATIVE BORIDE COATINGS

被引:47
|
作者
MITTERER, C [1 ]
KOMENDASTALLMAIER, J [1 ]
LOSBICHLER, P [1 ]
机构
[1] VIENNA TECH UNIV,INST ALLGEMEINE PHYS,A-1040 VIENNA,AUSTRIA
关键词
D O I
10.1016/0042-207X(95)00015-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Decorative hard coatings have to meet a variety of requirements such as attractive colour as well as high wear and corrosion resistance. After a review of PVD coatings used for decorative metal-finishing, an account is given of studies to extend the range of useful coating materials. Within the scope of the search for new colours several borides such as zirconium diboride ZrB2, lanthanum hexaboride LaB6 and zirconium dodecaboride ZrB12 were evaluated using magnetron sputtering. The nitrogen flow in a partially reactive process was used as an additional deposition parameter to influence film composition and properties. The interrelationships between structure, chemical composition and mechanical as well as optical properties were investigated. By means of non-reactive sputtering, crystalline films containing the ZrB2 or the LaB6 phase were formed. In the case of sputtering from the ZrB12, target, the ZrB2 phase was accompanied by a highly disordered boron or boron-rich phase. The incorporation of nitrogen leads to increasing lattice distortion and amorphous film growth at high concentrations. Among the coating types with interesting properties are nitrogen containing films sputtered reactively from ZrB2 target's that had an anthracite coloured surface and outstanding corrosion resistance. Violet coloured coatings deposited non-reactively from LaB6 targets are also potential candidates for decorative applications.
引用
收藏
页码:1281 / 1294
页数:14
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