On the influence of excited atoms on the electron kinetics of a surface wave sustained argon plasma

被引：26
|
作者：
Boehle, A. [1 ]
Kortshagen, U. [1 ]
机构：
[1] Ruhr Univ Bochum, Inst Expt Phys 2, D-44760 Bochum, Germany
来源：
PLASMA SOURCES SCIENCE & TECHNOLOGY | 1994年 / 3卷 / 01期
关键词：
D O I：
10.1088/0963-0252/3/1/010
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The influence of excited atoms on the characteristics of a surface wave produced argon discharge is investigated. A self-consistent model Is used to determine simultaneously the electron energy distribution function, the population densities of the 4s states of argon and the maintaining electric field strength. The theoretical results are compared with spectroscopic measurements of the population densities and with Langmuir probe results for the electron distribution function.
引用
收藏
页码：80 / 87
页数：8
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