DRY ETCH RESISTANCE ENHANCEMENT OF POLY(BUTENE-1-SULFONE)(PBS)BY PLASMA EXPOSURE

被引：0
|
作者：
MANSFIELD, WM [1 ]
机构：
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1986年 / 192卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：153 / PMSE
相关论文
共 39 条
  • [21] ENHANCED PLASMA ETCH RESISTANCE OF ACRYLIC ACID-CALCIUM ACETATE MODIFIED POLY(METHYLMETHACRYLATE)
    CHOI, JO
    KIM, SY
    MOORE, JA
    CORELLI, JC
    STECKL, AJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 382 - 385
  • [22] RADIATION DEGRADATION OF POLY(1-BUTENE SULFONE) MECHANISTIC DATA FROM FOURIER-TRANSFORM MASS-SPECTROMETRY
    LOO, JA
    WANG, BH
    WANG, FCY
    MCLAFFERTY, FW
    KLYMKO, P
    MACROMOLECULES, 1987, 20 (03) : 698 - 700
  • [23] THE ABSORPTION-COEFFICIENT SPECTRUM AND RADIATION DEGRADATION OF POLY(BUTENE-1 SULFONE) IN THE SOFT-X-RAY REGION
    YATES, BW
    SHINOZAKI, DM
    KUMAR, A
    MEATH, WJ
    JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 1993, 31 (12) : 1837 - 1844
  • [24] COMPUTER-SIMULATION OF ELECTRON-SCATTERING BY HEAVY-ATOMS ADDED INTO RESIST FOR DRY-ETCH RESISTANCE ENHANCEMENT
    HASEGAWA, S
    IIDA, Y
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (02) : 95 - 99
  • [25] COMPUTER-SIMULATION OF ELECTRON-SCATTERING BY HEAVY-ATOMS ADDED INTO RESIST FOR DRY-ETCH RESISTANCE ENHANCEMENT
    HASEGAWA, S
    IIDA, Y
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1985, 20 (01) : 15 - 19
  • [26] Electrical effects of N2 plasma exposure on dry-etch damage in p- and n-GaN Schottky diodes
    Kent, DG
    Lee, KP
    Zhang, AP
    Luo, B
    Overberg, ME
    Abernathy, CR
    Ren, F
    Mackenzie, KD
    Pearton, SJ
    Nakagawa, Y
    SOLID-STATE ELECTRONICS, 2001, 45 (10) : 1837 - 1842
  • [27] Modification of poly(styrene) thin films and enhancement of cryogenic plasma etching resistance by ruthenium tetroxide vapor staining
    Vital, A.
    Vayer, M.
    Sinturel, C.
    Tillocher, T.
    Lefaucheux, P.
    Dussart, R.
    Boufnichel, M.
    POLYMER, 2015, 76 : 123 - 130
  • [28] Simultaneous enhancement of proton conductivity and methanol resistance of sulfonated poly(phthalazinone ether sulfone ketone)/superacid sulfated zirconia composite membranes for direct methanol fuel cells
    Zhen, Dongxing
    He, Gaohong
    Xu, Xinlong
    Yan, Xiaoming
    Du, Naixu
    Gong, Xue
    Li, Tiantian
    Dai, Yan
    Wu, Xuemei
    JOURNAL OF APPLIED POLYMER SCIENCE, 2018, 135 (42)
  • [29] Analysis of plasma and urine for metabolites following inhalation exposure of female and male rats and mice to 1,3-butadiene or 1,2-dihydroxy-3-butene
    McDonald, JD
    Kracko, DA
    Walker, D
    Walker, V
    Dix, K
    DRUG METABOLISM REVIEWS, 2004, 36 : 159 - 159
  • [30] Analysis of plasma and urine for metabolites following inhalation exposure of female and male mice and rats to 1, 3-butadiene or 1, 2-dihydroxy-3-butene.
    Walker, D
    Henderson, R
    McDonald, J
    Kracko, D
    Blackwell, W
    Walker, V
    TOXICOLOGICAL SCIENCES, 2003, 72 : 242 - 242
1234