DRY ETCH RESISTANCE ENHANCEMENT OF POLY(BUTENE-1-SULFONE)(PBS)BY PLASMA EXPOSURE

被引：0

作者：

MANSFIELD, WM ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1986年 / 192卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：153 / PMSE

共 39 条

[1] ENHANCEMENT OF DRY-ETCH RESISTANCE OF POLY(BUTENE-1 SULFONE)
MANSFIELD, WM
ACS SYMPOSIUM SERIES, 1987, 346 : 317 - 333
[2] RADIATION DEGRADATION AND FILM SOLUBILITY RATES OF POLY(BUTENE-1-SULFONE)
STILLWAGON, L
ACS SYMPOSIUM SERIES, 1982, 184 : 19 - 27
[3] RADIATION DEGRADATION AND FILM SOLUBILITY RATES OF POLY(BUTENE-1-SULFONE)
STILLWAGON, LE
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1980, 180 (AUG): : 55 - ORPL
[4] OPTICAL AND ELECTRONIC-PROPERTIES OF THE ELECTRON-BEAM RESIST POLY(BUTENE-1-SULFONE)
WILLIAMS, MW
YOUNG, DW
ASHLEY, JC
ARAKAWA, ET
JOURNAL OF APPLIED PHYSICS, 1985, 58 (11) : 4360 - 4364
[5] INTERACTION OF LOW-ENERGY ELECTRONS WITH THE ELECTRON-BEAM RESIST POLY(BUTENE-1-SULFONE)
ASHLEY, JC
JOURNAL OF APPLIED PHYSICS, 1988, 63 (09) : 4620 - 4625
[6] XPS study of radiation-induced modification of poly(butene-1-sulfone): Dependence on the energy deposition mechanism
Iacona, F
Marletta, G
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 166 : 676 - 681
[7] GAMMA-RADIOLYSIS OF POLY(BUTENE-1 SULFONE) AND POLY(HEXENE-1 SULFONE)
BROWN, JR
ODONNELL, JH
MACROMOLECULES, 1972, 5 (02) : 109 - &
[8] SOLUTION PROPERTIES OF POLY(BUTENE-1 SULFONE)
BROWN, JR
ODONNELL, JH
JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1972, A 6 (07): : 1411 - 1416
[9] ENHANCEMENT OF CF4 AND O2 REACTIVE ION ETCHING RESISTANCE OF POLY(BUTENE-1 SULFONE) BY N2 PLASMA PRETREATMENT
LOONG, WA
CHANG, HW
ELECTRONICS LETTERS, 1991, 27 (06) : 541 - 542
[10] THERMAL-DEGRADATION OF POLY(1-BUTENE SULFONE)
BOWDEN, MJ
THOMPSON, LF
ROBINSON, W
BIOLSI, M
MACROMOLECULES, 1982, 15 (05) : 1417 - 1422

← 1 2 3 4 →