MEASUREMENT OF TEM PRIMARY ENERGY WITH AN ELECTRON-ENERGY-LOSS SPECTROMETER

被引：1

作者：

MEYER, CE ^{[1
]}

BOOTHROYD, CB ^{[1
]}

GUBBENS, AJ ^{[1
]}

KRIVANEK, OL ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,DEPT MAT SCI & MET,CAMBRIDGE CB2 3QZ,ENGLAND

来源：

ULTRAMICROSCOPY | 1995年 / 59卷 / 1-4期

关键词：

D O I：

10.1016/0304-3991(95)00035-Y

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We describe a simple technique for measuring the primary energy of a transmission electron microscope (TEM) using an electron energy-loss spectrometer. The technique is checked against a measurement based on simulating a convergent beam diffraction pattern, and found to be accurate to better than 0.1%.

引用

页码：283 / 285

页数：3

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