EMISSION PROPERTIES OF AUSISB LIQUID-METAL ION-SOURCE

被引：1
|
作者：
DRANDAROV, N
NIKOLOV, B
TSVETKOV, T
KEBEDGIEV, A
机构：
[1] Institute of Electronics, Bulgarian Academy of Sciences, 1784 Sofia
来源：
VACUUM | 1993年 / 44卷 / 11-12期
关键词：
D O I：
10.1016/0042-207X(93)90332-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A liquid metal ion source which produces Si and Sb ions from a AuSiSb alloy has been investigated. Intensive lines of Si2+ and Sb2+ ions, which are very suitable for use in focused ion beam systems, have been identified in the mass spectrum of the source. The full width at half maximum of the energy distribution is evaluated at 15 eV Three emission regions and hysteresis behaviour have been observed in the current-voltage characteristics.
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页码：1105 / 1107
页数：3
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