SYNTHESIS AND APPLICATIONS OF ACID-LABILE ACRYLIC POLYMERS

被引：4

作者：

HERTLER, WR ^{[1
]}

SOGAH, DY ^{[1
]}

RAYMOND, FA ^{[1
]}

BAUER, RD ^{[1
]}

CHANG, CT ^{[1
]}

TAYLOR, GN ^{[1
]}

STILLWAGON, LE ^{[1
]}

机构：

[1] AT&T BELL LABS, MURRAY HILL, NJ 07974 USA

来源：

MAKROMOLEKULARE CHEMIE-MACROMOLECULAR SYMPOSIA | 1992年 / 64卷

关键词：

D O I：

10.1002/masy.19920640114

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

A variety of acrylic and methacrylic acetal esters were synthesized by reaction of unsaturated carboxylic acids with vinyl ethers. The acetal esters were converted by radical polymerization and GTP to acid-labile homo- and copolymers. Coatings of these polymeric acetal esters containing photosensitive acid-generating compounds are useful in image-formation through chemical amplification. Thus, poly(tetrahydropyranyl methacrylate-co-benzyl methacrylate) can be used in positive working deep UV microlithography. Poly(tetrahydropyranyl acrylate), coated in a thin layer over a tacky elastomer, provides a high resolution, water-developable negative working tonable composition. Several polymeric and nonpolymeric acetal esters can be used for positive working electrostatic imaging through changes in electrical conductivity.

引用

页码：137 / 149

页数：13

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