FABRICATION OF INTEGRATED OPTICAL ELEMENTS USING A COMPUTER-CONTROLLED ELECTRON-BEAM

被引：15
|
作者：
OSTROWSKY, DB [1 ]
PAPUCHON, M [1 ]
ROY, AM [1 ]
TROTEL, J [1 ]
机构：
[1] THOMSON CSF, LAB CENT RECH, BP 10, DOMAINE CORBEVILLE, 91401 ORSAY, FRANCE
来源：
APPLIED OPTICS | 1974年 / 13卷 / 03期
关键词：
D O I：
10.1364/AO.13.000636
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：636 / 641
页数：6
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