FABRICATION OF INTEGRATED OPTICAL ELEMENTS USING A COMPUTER-CONTROLLED ELECTRON-BEAM

被引：15

作者：

OSTROWSKY, DB ^{[1
]}

PAPUCHON, M ^{[1
]}

ROY, AM ^{[1
]}

TROTEL, J ^{[1
]}

机构：

[1] THOMSON CSF, LAB CENT RECH, BP 10, DOMAINE CORBEVILLE, 91401 ORSAY, FRANCE

来源：

APPLIED OPTICS | 1974年 / 13卷 / 03期

关键词：

D O I：

10.1364/AO.13.000636

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：636 / 641

页数：6

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