STRESS-INDUCED VOID FORMATION IN METAL LINES

被引：16
|
作者：
FLINN, PA
MACK, AS
BESSER, PR
MARIEB, TN
机构：
[1] INTEL CORP, SANTA CLARA, CA USA
[2] ADV MICRO DEVICES INC, DIV INTEGRATED TECHNOL, SUNNYVALE, CA USA
来源：
MRS BULLETIN | 1993年 / 18卷 / 12期
关键词：
D O I：
10.1557/S0883769400039051
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：26 / 35
页数：10
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