CHARACTERIZATION OF THE IMPLANTATION DAMAGE IN SIO2 WITH X-RAY PHOTOELECTRON-SPECTROSCOPY

被引：17
|
作者：
AJIOKA, T
USHIO, S
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 20期
关键词：
D O I：
10.1063/1.96921
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1398 / 1399
页数：2
相关论文
共 50 条
  • [1] X-RAY PHOTOELECTRON-SPECTROSCOPY OF THERMALLY TREATED SIO2 SURFACES
    MILLER, ML
    LINTON, RW
    ANALYTICAL CHEMISTRY, 1985, 57 (12) : 2314 - 2319
  • [2] A NOVEL X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF THE AL/SIO2 INTERFACE
    HECHT, MH
    VASQUEZ, RP
    GRUNTHANER, FJ
    ZAMANI, N
    MASERJIAN, J
    JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) : 5256 - 5262
  • [3] AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF THE THERMAL NITRIDATION OF SIO2/SI
    VASQUEZ, RP
    MADHUKAR, A
    GRUNTHANER, FJ
    NAIMAN, ML
    JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) : 226 - 233
  • [4] X-RAY PHOTOELECTRON-SPECTROSCOPY OF (FE,CO,NI)-SIO2 GRANULAR FILMS
    SHAH, SI
    UNRUH, KM
    APPLIED PHYSICS LETTERS, 1991, 59 (26) : 3485 - 3487
  • [5] ELECTRONIC-STRUCTURE OF SIO2 POLYMORPHS BY X-RAY PHOTOELECTRON-SPECTROSCOPY (XPS)
    ROY, PK
    POLLAK, RA
    DISTEFANO, TH
    DACHILLE, F
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (03): : 475 - 475
  • [6] X-RAY PHOTOELECTRON-SPECTROSCOPY OF SULFUR-CONTAINING NI/SIO2 CATALYSTS
    MONTES, M
    GENET, M
    HODNETT, BK
    STONE, WE
    DELMON, B
    BULLETIN DES SOCIETES CHIMIQUES BELGES, 1986, 95 (01): : 1 - 12
  • [7] Application of X-ray photoelectron spectroscopy to characterization of Au nanoparticles formed by ion implantation into SiO2
    Takahiro, K.
    Oizumi, S.
    Morimoto, K.
    Kawatsura, K.
    Isshiki, T.
    Nishio, K.
    Nagata, S.
    Yamamoto, S.
    Narumi, K.
    Naramoto, H.
    APPLIED SURFACE SCIENCE, 2009, 256 (04) : 1061 - 1064
  • [8] X-RAY PHOTOELECTRON-SPECTROSCOPY AND ION-SCATTERING SPECTROSCOPY OF SUBMONOLAYER COVERAGE OF AG ON SIO2
    PITTS, JR
    THOMAS, TM
    CZANDERNA, AW
    PASSLER, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1169 - 1170
  • [9] Characterization of Si nanocrystals embedded in SiO2 with X-ray photoelectron spectroscopy
    Liu, Y
    Chen, TP
    Fu, YQ
    Hsieh, JH
    SCIENCE AND TECHNOLOGY OF NANOMATERIALS - ICMAT 2003, 2005, 23 : 11 - 14
  • [10] X-ray photoelectron characterization of SiO2 aerogel
    Connor, MW
    Colmenares, C
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 201 (1-2) : 76 - 80
12345