RADIO-FREQUENCY SPUTTER DEPOSITION OF ALLOY-FILMS

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作者：
HIEBER, K
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来源：
SIEMENS FORSCHUNGS-UND ENTWICKLUNGSBERICHTE-SIEMENS RESEARCH AND DEVELOPMENT REPORTS | 1982年 / 11卷 / 03期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：145 / 148
页数：4
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