AN INVESTIGATION OF THE SURFACE OF IMPLANTED SILICON CRYSTAL BY THE CONTACT-ANGLE

被引:0
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LEBEDEVA, NN
BAKOVETS, VV
SEDYMOVA, EA
PRIDACHIN, NB
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INORGANIC MATERIALS | 1986年 / 22卷 / 10期
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T [工业技术];
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08 ;
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页码:1404 / 1407
页数:4
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