BARIUM FLUORIDE AND STRONTIUM FLUORIDE NEGATIVE ELECTRON-BEAM RESISTS

被引:15
|
作者
SCHERER, A
CRAIGHEAD, HG
机构
来源
关键词
D O I
10.1116/1.583906
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:374 / 378
页数:5
相关论文
共 50 条
  • [1] ELECTRON-BEAM EXPOSURE OF NEGATIVE RESISTS
    ERSOY, O
    [J]. OPTIK, 1976, 45 (04): : 345 - 353
  • [2] REACTIVE PLASTICIZERS IN NEGATIVE ELECTRON-BEAM RESISTS
    NAMASTE, YMN
    OBENDORF, SK
    RODRIGUEZ, F
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2245 - 2248
  • [3] INVESTIGATION OF POSITIVE AND NEGATIVE RESISTS FOR ELECTRON-BEAM MICROFABRICATION
    RAI, JH
    SHEPHERD, LT
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1975, 170 (AUG24): : 34 - 34
  • [4] ELECTRON-BEAM RESISTS-NEGATIVE RESISTS BASED ON POLY(ALKYL METHACRYLATE)
    HAYWARD, D
    BAKHSHAEE, M
    AFFROSSMAN, S
    PETHRICK, RA
    [J]. POLYMER COMMUNICATIONS, 1987, 28 (11): : 315 - 317
  • [5] Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate
    Tharp, J. S.
    Shelton, D. J.
    Wadsworth, S. L.
    Boreman, G. D.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (05): : 1821 - 1823
  • [6] PHENOLIC RESIN-BASED NEGATIVE ELECTRON-BEAM RESISTS
    SHIRAISHI, H
    HAYASHI, N
    UENO, T
    SUGA, O
    MURAI, F
    NONOGAKI, S
    [J]. ACS SYMPOSIUM SERIES, 1987, 346 : 77 - 85
  • [7] ELECTRON-BEAM EXCITATION OF CESIUM FLUORIDE IONIC EXCIMER
    XING, D
    UEDA, K
    TAKUMA, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (6A): : L1012 - L1014
  • [8] RESISTS FOR ELECTRON-BEAM LITHOGRAPHY
    TAMAMURA, T
    IMAMURA, S
    SUGAWARA, S
    [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1983, 185 (MAR): : 32 - ORPL
  • [9] RESISTS FOR ELECTRON-BEAM LITHOGRAPHY
    TAMAMURA, T
    IMAMURA, S
    SUGAWARA, S
    [J]. ACS SYMPOSIUM SERIES, 1984, 242 : 103 - 118
  • [10] LANGMUIR STUDIES OF SUBLIMATION OF STRONTIUM FLUORIDE AND BARIUM FLUORIDE SINGLE CRYSTALS
    BAUTISTA, RG
    MARGRAVE, JL
    [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1965, 69 (05): : 1770 - +