STRUCTURAL INTEGRITY IN OPTICAL-SYSTEMS

被引:0
|
作者
LOEWEN, EG [1 ]
机构
[1] MILTON ROY ANALYT PROD DIV,ROCHESTER,NY 14625
来源
APPLIED OPTICS | 1990年 / 29卷 / 13期
关键词
D O I
10.1364/AO.29.001842
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Structural integrity in optical systems must be maintained to achieve submicron tolerances in optomechanical systems with moving parts—particularly important in microelectronics. Typical problems are illustrated with solutions. © 1990 Optical Society of America.
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页码:1842 / 1843
页数:2
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