PLASMA POLYMERIZATION OF SPUTTERED POLY(TETRAFLUOROETHYLENE)

被引：68
|
作者：
RYAN, ME
FONSECA, JLC
TASKER, S
BADYAL, JPS
机构：
[1] Department of Chemistry, Science Laboratories, University of Durham
来源：
JOURNAL OF PHYSICAL CHEMISTRY | 1995年 / 99卷 / 18期
关键词：
D O I：
10.1021/j100018a044
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Plasma polymerization of sputtered poly(tetrafluoroethylene) (PTFE) using nonequilibrium helium, neon, argon, nitrogen, and hydrogen glow discharges has been followed by X-ray photoelectron spectroscopy (XPS), infrared spectroscopy, and UV emission spectroscopy. The chemical character of the resultant fluoropolymer deposits is found to be strongly influenced by the type of carrier gas employed.
引用
收藏
页码：7060 / 7064
页数：5
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