PATTERN DEFINITION FOR THE MANUFACTURE OF LARGE-SCALE INTEGRATED-CIRCUITS

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作者：

HESLOP, CJ

HINES, RE

WOODWARD, JW

机构：

来源：

POST OFFICE ELECTRICAL ENGINEERS JOURNAL | 1981年 / 73卷 / JAN期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：208 / 215

页数：8

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