GROWTH BY MOLECULAR-BEAM EPITAXY OF (RARE-EARTH GROUP-V ELEMENT) III-V SEMICONDUCTOR HETEROSTRUCTURES

被引:13
|
作者
GUIVARCH, A
LECORRE, A
AUVRAY, P
GUENAIS, B
CAULET, J
BALLINI, Y
GUERIN, R
DEPUTIER, S
LECLANCHE, MC
JEZEQUEL, G
LEPINE, B
QUEMERAIS, A
SEBILLEAU, D
机构
[1] UNIV RENNES 1,CHIM SOLIDE & INORGAN MOLEC LAB,CNRS,UA 1495,F-35042 RENNES,FRANCE
[2] LAB SPECT SOLIDE,CNRS,URA 1202,F-35042 RENNES,FRANCE
关键词
D O I
10.1557/JMR.1995.1942
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper deals with the growth by molecular beam epitaxy of semimetallic (rare-earth group V element) compounds on III-V semiconductors. Results are presented, first on the Er-Ga-As and Er-Ga-Sb ternary phase diagrams, second on the lattice-mismatched Er-As/GaAs (delta a/a approximate to +1.6%), YbAs/GaAs (delta a/a approximate to +0.8%), and ErSb/GaSb (delta a/a approximate to +0.2%) heterostructures, and third on the lattice-matched Sc0.3Er0.7As/GaAs and Sc0.2Yb0.8As/GaAs systems (delta a/a < 0.05%). Finally the growth of YbSb2 on GaSb(001) is reported. The studies made in situ by reflection high-energy electron diffraction (RHEED) and x-ray photoelectron diffraction and ex situ by x-ray diffraction, transmission electron microscopy, He+ Rutherford backscattering, and photoelectron spectroscopy are presented. We discuss the atomic registry of the epitaxial layers with respect to the substrates, the appearance of a mosaic effect in lattice-mismatched structures, and the optical and electrical properties of the semimetallic films. The problems encountered for III-V overgrowth on these compounds (lack of wetting and symmetry-related defects) are commented on, and we underline the interest of compounds as YbSb2 which avoid the appearance of inversion defects in the GaSb overlayers.
引用
收藏
页码:1942 / 1952
页数:11
相关论文
共 50 条
  • [21] In situ studies of III-V semiconductor film growth by molecular beam epitaxy
    Joyce, B.A.
    Vvedensky, D.D.
    Jones, T.S.
    Itoh, M.
    Bell, G.R.
    Belk, J.G.
    Journal of Crystal Growth, 1999, 201 : 106 - 112
  • [22] In situ studies of III-V semiconductor film growth by molecular beam epitaxy
    Joyce, BA
    Vvedensky, DD
    Jones, TS
    Itoh, M
    Bell, GR
    Belk, JG
    JOURNAL OF CRYSTAL GROWTH, 1999, 201 : 106 - 112
  • [23] THE CURRENT STATE OF III-V MOLECULAR-BEAM EPITAXY FOR OPTOELECTRONICS
    PANISH, MB
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) : C95 - C95
  • [24] GAN BASED III-V NITRIDES BY MOLECULAR-BEAM EPITAXY
    MORKOC, H
    BOTCHKAREV, A
    SALVADOR, A
    SVERDLOV, B
    JOURNAL OF CRYSTAL GROWTH, 1995, 150 (1-4) : 887 - 891
  • [26] Growth of III-V nitrides by molecular beam epitaxy
    Moustakas, TD
    GALLIUM NITRIDE (GAN) II, 1999, 57 : 33 - 128
  • [27] SURFACTANT-MEDIATED MOLECULAR-BEAM EPITAXY OF III-V STRAINED-LAYER HETEROSTRUCTURES
    TOURNIE, E
    GRANDJEAN, N
    TRAMPERT, A
    MASSIES, J
    PLOOG, KH
    JOURNAL OF CRYSTAL GROWTH, 1995, 150 (1-4) : 460 - 466
  • [28] COMPUTER-SIMULATIONS OF THE ROLE OF GROUP-V MOLECULAR REACTIONS AT STEPS DURING MOLECULAR-BEAM EPITAXIAL-GROWTH OF III-V SEMICONDUCTORS
    THOMSEN, M
    MADHUKAR, A
    JOURNAL OF CRYSTAL GROWTH, 1987, 80 (02) : 275 - 288
  • [29] NOVEL III/V HETEROSTRUCTURES FABRICATED BY METALORGANIC MOLECULAR-BEAM EPITAXY
    HEINECKE, H
    MILDE, A
    MATZ, R
    BAUR, B
    PRIMIG, R
    PHYSICA SCRIPTA, 1994, 55 : 14 - 19
  • [30] MOLECULAR-BEAM EPITAXY OF HETEROSTRUCTURES MADE OF III-V-COMPOUNDS
    KOPEV, PS
    LEDENTSOV, NN
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1988, 22 (10): : 1093 - 1101