MAGNETIC RETENTION OF EVAPORATION OR SPUTTERING MASKS

被引：0
|
作者：
JONES, FE [1 ]
机构：
[1] NATL BUR STAND,INST BASIC STANDARDS,WASHINGTON,DC 20234
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1975年 / 46卷 / 06期
关键词：
D O I：
10.1063/1.1134317
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：793 / 793
页数：1
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