MAGNETIC RETENTION OF EVAPORATION OR SPUTTERING MASKS

被引：0

|

作者：

JONES, FE ^{[1
]}

机构：

[1] NATL BUR STAND,INST BASIC STANDARDS,WASHINGTON,DC 20234

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1975年 / 46卷 / 06期

关键词：

D O I：

10.1063/1.1134317

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：793 / 793

页数：1

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