An Integrated Design Optimization for Monolithic Mechanical Amplifier in PZT Nano-Positioning Stage

In order to satisfy the accelerating nanotechnology of high-tech precision manufacturing, it is essential to develop the efficient integration of amplifying device producing very fine resolution. This paper proposes such a development using topological optimal synthesis to design a monolithic mechanical amplifying lever actuated by a PZT in single-axis nano-positioning stage. This one-piece compound compliant mechanism consists of an amplifier and nano-motion bed. The resultant amplifier yields to a larger magnification factor than that in original design. The completed design implementation shows that the presenting design optimization is practical to apply. In addition, it provides a creative computational aided design (CAD) environment and integrated design process for mechanical amplifier and nano-positioning stage.