ADVANCED IMAGE-PROCESSING IN SCANNING PROBE MICROSCOPY

被引:1
|
作者
URBAN, FK
ROMINE, P
ISLAM, MS
机构
[1] Department of Electrical and Computer Engineering, Florida International University, Miami
关键词
ATOMIC FORCE MICROSCOPY; COATINGS; SILICON OXIDE; SURFACE MORPHOLOGY;
D O I
10.1016/0040-6090(94)90341-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A single data set in scanning probe microscopy is large, typically in the megabyte range. Interpretation of these large data sets is accomplished by displaying them in image form for visualization. Image processing methods are used both to convert the data sets to visual images and to control the images to clarify features of interest. Image processing can be divided broadly into three categories: point, area, and frame. Although it seems that nearly all point processes and an impressive number of array processes are available on most commercial probe microscopes, many potentially very interesting area and frame processes are not readily available. This work presents images produced using atomic force microscope data sets. Average one-dimensional Fourier transforms of image data are used to show quantitatively tip and measuring system image degradation. The use of histogram slope data as a foundation for real time image quality monitoring is shown.
引用
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页码:318 / 325
页数:8
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