INVESTIGATION OF HYDROGEN IN SEMICONDUCTORS BY NUCLEAR TECHNIQUES

被引:10
|
作者
DEICHER, M [1 ]
KELLER, R [1 ]
PFEIFFER, W [1 ]
SKUDLIK, H [1 ]
WICHERT, T [1 ]
机构
[1] UNIV SAARLAND, W-6600 SAARBRUCKEN, GERMANY
关键词
D O I
10.1016/0921-4526(91)90145-5
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The interaction of hydrogen with shallow and deep level impurities in crystalline semiconductors results in a passivation of their electrical activity by the formation of complexes. Nuclear techniques, like the perturbed gamma-gamma-angular correlation (PAC) and the channeling of charged particles, have contributed to the understanding of the behaviour and microscopic structure of these complexes. A brief introduction to these techniques will be given. The results on the behaviour of hydrogen, in both elemental and compound semi-conductors, will be reviewed. For the case of Si, the information obtained on the formation, geometry and stability of acceptor-hydrogen complexes will be discussed more extensively.
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页码:335 / 350
页数:16
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