DEPTH PROFILING OF THE THIN METAL-FILM SANDWICHES BY SIMS IN CHEMICALLY ACTIVE CONDITIONS

被引：0
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作者：
SMIRNOV, VK
SIMAKIN, SG
POTAPOV, EV
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来源：
IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1990年 / 54卷 / 07期
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O4 [物理学];
学科分类号：
0702 ;
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页码：1343 / 1346
页数：4
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