DISSOLUTION OF TRANSITION-METAL PRECIPITATES IN SILICON BY RAPID THERMAL-PROCESSING

被引：6

|

作者：

SPARKS, DR

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 02期

关键词：

D O I：

10.1149/1.2100479

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

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页码：458 / 462

页数：5

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