OBSERVATION OF FE-MN OXIDATION PROCESS USING SPECIMEN TRANSFER CHAMBER AND ULTRAHIGH-VACUUM TRANSMISSION ELECTRON-MICROSCOPE

被引：6
|
作者：
KOGUCHI, M
KAKIBAYASHI, H
NAKATANI, R
机构：
[1] Central Research Laboratory, Hitachi Ltd., Kokubunji Tokyo
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 10期
关键词：
TRANSFER CHAMBER; UHV-TEM; OXIDATION PROCESS; FE-MN; (FE-MN)2O3; GRAIN BOUNDARY;
D O I：
10.1143/JJAP.32.4814
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A specimen transfer chamber that enables a specimen to be transferred in vacuum from a thin-film growth apparatus to an ultrahigh-vacuum transmission electron microscope (UHV-TEM) was developed. This chamber was applied to observe, for the first time, the as-grown state-of Fe-Mn thin films and the changes occurring during their oxidation. The oxidation process of 12-nm-thick Fe-Mn films on a carbon support film was observed by controlling the vacuum in the transfer chamber. Just after a film specimen was transferred, it had a polycrystalline single-phase structure. When the film was exposed to pressures from 3.8 X 10(-6) Pa to 1 atm, (Fe-Mn)203 gradually appeared around the Fe-Mn grain boundaries. The Fe-Mn grains changed to (Fe-Mn)2O3 grains after 47 h of exposure to air.
引用
收藏
页码：4814 / 4818
页数：5
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