RUTHERFORD BACKSCATTERING AND ELLIPSOMETRY OF SELENIUM IMPLANTED INP

被引：12
|
作者：
GILL, SS
SEALY, BJ
STEPHENS, KG
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1981年 / 14卷 / 10期
关键词：
D O I：
10.1088/0022-3727/14/10/024
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1915 / 1922
页数：8
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