APPLICATION OF WHITE-LIGHT INTERFEROMETRY IN THIN-FILM MEASUREMENTS

被引：40
|
作者：
LIN, C
SULLIVAN, RF
机构：
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1972年 / 16卷 / 03期
关键词：
D O I：
10.1147/rd.163.0269
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
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页码：269 / &
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