Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement

被引：1
|
作者：
Hlubina, P. [1 ]
Ciprian, D. [1 ]
Lunacek, J. [1 ]
机构：
[1] Tech Univ Ostrava, Dept Phys, CZ-70833 Ostrava, Czech Republic
来源：
OPTIK | 2007年 / 118卷 / 07期
关键词：
white light; spectral interferometry; thin-film structure; nonlinear phase function; distance;
D O I：
10.1016/j.ijleo.2006.04.002
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A spectral-domain white-light interferometric technique is used for measuring distances in a Michelson interferometer with a mirror represented by a thin-film structure (TFS) on a substrate. A fibre-optic spectrometer is employed for recording spectral interferograms that include wide wavelength range effects of dispersion in a cube beam splitter and multiple reflection within the TFS. Knowing the effective thickness of the beam splitter, its dispersion and parameters of the TFS and substrate, the positions of the second interferometer mirror are determined precisely by a least-squares fitting of the theoretical spectral interferograms to the recorded ones. We apply the technique to the beam splitter made of BK7 optical glass and to a uniform SiO2 thin film on a silicon wafer. We compare the results of the processing that include and do not include the effect of the TFS. (C) 2006 Elsevier GmbH. All rights reserved.
引用
收藏
页码：319 / 324
页数：6
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