MOSFETS IN LASER-RECRYSTALLIZED POLYSILICON ON QUARTZ

被引:46
|
作者
KAMINS, TI
PIANETTA, PA
机构
来源
ELECTRON DEVICE LETTERS | 1980年 / 1卷 / 10期
关键词
D O I
10.1109/EDL.1980.25293
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:214 / 216
页数:3
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