COMPUTERIZED ESTIMATION OF THE SILICON SURFACE THERMAL-OXIDATION

被引：0
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作者：
TSURIN, OF
SINEKOP, YS
BONAT, EE
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来源：
IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII RADIOELEKTRONIKA | 1987年 / 30卷 / 08期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：93 / 96
页数：4
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