IMPROVEMENT OF A-SIC-H ALLOYS BY HYDROGEN DILUTION OF STARTING GASES

被引:18
|
作者
CAMARGO, SS [1 ]
BEYER, W [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, INST SCHICHT & IONENTECH, W-5170 JULICH 1, GERMANY
关键词
D O I
10.1016/0022-3093(89)90727-8
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:807 / 809
页数:3
相关论文
共 50 条
  • [31] ON THE DIFFERENCES BETWEEN A-SIC-H FILMS DEPOSITED WITH AND WITHOUT FLUORINE
    MAHAN, AH
    WILLIAMSON, DL
    RUTH, M
    RABOISSON, P
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 861 - 864
  • [32] INFRARED STUDY OF THE SI-H STRETCHING BAND IN A-SIC-H - REPLY
    KOROPECKI, RR
    ALVAREZ, F
    ARCE, R
    JOURNAL OF APPLIED PHYSICS, 1992, 71 (08) : 4092 - 4093
  • [33] INFRARED STUDY OF THE SI-H STRETCHING BAND IN A-SIC-H - COMMENT
    SACHER, E
    JOURNAL OF APPLIED PHYSICS, 1992, 71 (08) : 4091 - 4091
  • [34] Impacts of hydrogen dilution on growth and optical properties of a-SiC:H films
    Hu, ZH
    Liao, XB
    Diao, HW
    Kong, GL
    Zeng, XB
    Xu, YY
    SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES, 2004, 47 (03): : 327 - 334
  • [35] STRUCTURAL CHARACTERIZATION OF A-SIC-H BY THERMAL-DESORPTION SPECTROSCOPY
    MAASS, F
    BERTOMEU, J
    ASENSI, JM
    PUIGDOLLERS, J
    ANDREU, J
    DELGADO, JC
    ESTEVE, J
    APPLIED SURFACE SCIENCE, 1993, 70-1 (1 -4 pt B) : 768 - 771
  • [36] PHOTOLUMINESCENCE OF AMORPHOUS HYDROGENATED SILICON CARBON (A-SIC-H) FILMS
    VASSILYEV, VA
    VOLKOV, AS
    MUSABEKOV, E
    TERUKOV, EI
    CHERNYSHOV, SV
    SHERNYAKOV, YM
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 507 - 509
  • [38] A STUDY ON THE STRUCTURAL CHARACTERIZATION OF A-SIC-H FILMS BY THE GAS EVOLUTION METHOD
    PARK, JH
    CHOI, JB
    KIM, HY
    LEE, KY
    LEE, JY
    THIN SOLID FILMS, 1995, 266 (02) : 129 - 132
  • [39] A-SIC-H THIN-FILM VISIBLE LIGHT-EMITTING-DIODES WITH HIGHLY CONDUCTIVE WIDE-BAND GAP A-SIC-H AS THE CARRIER INJECTION LAYERS
    LAU, SP
    MARSHALL, JM
    DYER, TE
    HEPBURN, AR
    DAVIES, JF
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1993, 166 : 813 - 816
  • [40] ALUMINUM-ENHANCED DESTRUCTION OF A-SI-H/A-SIC-H MULTILAYER STRUCTURES
    SHINOHARA, K
    MORIYAMA, F
    NATORI, K
    KUKIMOTO, H
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1988, 105 (03) : 292 - 294