CLOSED-LOOP JOB RELEASE CONTROL FOR VLSI CIRCUIT MANUFACTURING

被引：218
|
作者：
GLASSEY, CR
RESENDE, MGC
机构：
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1988年 / 1卷 / 01期
关键词：
D O I：
10.1109/66.4371
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：36 / 46
页数：11
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